MSA low temperature

By Mickael Boudot
Product description
Product name and/or Chemical formula
Me-SiO2
Additional product information
Physical and/or Chemical Properties

Dielectric hydrophobic

Chemical properties
Applications
Antirefletive coating Low k layer
Corresponding reference(s)
Boudot, M.; Gaud, V.; Mélanie, L.; Selmane, M.; Grosso, D. Chem. Mater. 2014, 26, 1822–1833.
States / Forms

Porous materials

Coating

Detailed method
About this synthesis
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