MFA-001 (Standard)

By David Grosso
Product description
Product name and/or Chemical formula
Magnesium Oxyfluoride
Additional product information
MgOxF2-2x
Physical and/or Chemical Properties

Dielectric

Chemical properties
Applications
Anti-reflective coating Low-k layer
Corresponding reference(s)
D. Grosso et al. Nature Materials 2007, 6, 572. J.D. Bass et al. Chem. Mater. 2008, 20, 5550. D. Grosso, et al. Oxyfluoride in the Form of a Film and Preparation Method. Patent FR2893320; WO/2007/057551, (2007).
States / Forms

Ceramic

Coating

Porous materials

Detailed method
About this synthesis
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